Frequecy Tripling:
Hurricane output beam goes through a frequency upconversion process using nonlinear effects on crystals transmission. The frequency upconverter – frequency tripler - system is made by Spectra-Physics Company. After frequency tripling the wavelength of the pulse is changing from 745 nm to 248.5 nm. Main beam parameters after tripler:
- pulse power: 45-50 mW (energy: ~ 80-90 microjoules)
- pulse duration: ~120-130 fs
- wavelength: 248.5 nm (KrF excimer)
- beam size: 5 mm in diameter